Probe Card Semiautomatic Needle Adjustment System
Specification:
Structure | Granite Stage Linear Motor Control Motion Resolution : 0.1μm Motion Repeatability : ±1μm | ||
Optical | Component | Resolution | |
X-Y | Z | ||
Confocal | 1μm | 0.2μm | |
CCD | 1.2μm | 90μm | |
Microscope | ~80X |